Klement et al.,
ACS Appl. Mater. Interfaces

15. April 2021/in Publications /by sfb1083

Surface Diffusion Control Enables Tailored Aspect Ratio Nanostructures in Area-Selective Atomic Layer Deposition

P. Klement, D. Anders, L. Gümbel, M. Bastianello, F. Michel, J. Schörmann, M.T. Elm, C. Heiliger, S. Chatterjee
ACS Appl. Mater. Interfaces (2021)
DOI:10.1021/acsami.0c22121

List of all SFB 1083 publications.

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